ISO 04518-2021.docx

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1、INTERNATIONA1.STANDARDISO4518editionSeCond202104Meta1.1.iccoatingsMeasurementofcoatingthicknessProfi1.ometricmethodRevdtemcntsmta1.1.iqucsMesuragedeITpaisseurderevtementMethodeprofi1.ometriqueOISO2021COPYRIGHTPROTECTEDDOCUMENTISO2021岫rkdea/山thUcdOthcnviscjftc三orrtmcehDVBiwixuioiti08phnn11UatiocBhrho

2、tocp)Mng,ptbcatonpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanherequestedfromeitherISOattheaddressbe1.oworISsmemberbodyinthecountryoftherequester.%,tft晒Iandonnet8CH-1214*crnicr,GenevaPhone：M1.22749O1.11Pub1.ishedinSwitzerhnd5Instrumentation-Operationa1.parametersandmea

3、surementcharacteristics5.1 Typesofprofi1.erecordinginstrumentsa) contactmeasureinstruments,roughnesssurfaceana1.ysers*purposesofprofi1.erecorders*,genera1.1.yThisdocumentspecifiesamethodforthemeasurementofmeta1.coatingthicknessbyfirstformingastepusingIheprofi1.eofthecoatingandItcoversofsubstrateandt

4、henmeasuringthethePnxredUreappropriatetothisspecificapp1.icationofprofi1.ometricmethods.onf1.atmethodisand,iftheprecautionsaretaken,ofmeta1.coatingsfromItismto1OOOmforthemeasurementofminutethicknessesbut.forthicknessesof1.essthan0,01m,surfacef1.atnessandsurfacesmoothnessareverycritica1.and,according

5、1.y,themethodisnotsuitab1.eforusedowntothe1.owest1.eve1.ofthicknessesforcoatingsty1.usreferenceThemethodThefo1.1.owingdocumentsarereferredtointhetextinsuchawaythatsomeora1.1.oftheircontentundatedreferences,theofthisoftheFordateddocumenton1.yIhcanycditioncitedForISO2177,Meta1.1.iccoatingsMeasuremento

6、fcoatingthicknessCou1.ometricmethodbyanodicNotermsanddefinitionsare1.istedinthisdocument.ISOOn1.inebrowsingp1.atform:avai1.ab1.eathttps:/www.iso.org/obp4IECPrincip1.eoftheofsteptobydisso1.vingpartofthecoating(acceptanceoftheorbyofthestepusingaprofi1.erecordinginstrument.Anyofthefo1.1.owingthreetypes

7、maybeused:usedsty1.ussurfaceknownasbutwhich,fortheand*surfacethisdocument,areusedtorecordtheprofi1.eofastep;b) inductivemeasuringprobeordisp1.acementsensor(incrementa1.orabso1.ute)capab1.eofrecordingtheprofi1.eofstep;c) optica1.profi1.ometers,i.e.white-1.ightinterferencemicroscopesorconfoca1.microsc

8、opes(ordinary,W3ft5HdPWic),butwhiWf1.1.ypuVredUfitaftE8MphdWftaneva1.uatetheprofi1.eofastep.娜I网IfcSP硼斑ave谈1M腿搬PFcansuitab1.es稠雕呼三酬糕Ky1.U如期蝴ISnadesignedon1.yforroughnessgenera1.1.ycoverarangeofcoatingthicknessesfrom0r005mto250m.Othercontactinstrumentscoveruptoapproximate1.y1000m.5.2 Sty1.usinstrument

9、sTheseinstrumentsareusedtorecordtheprofi1.eofasurfaceandhavethefo1.1.owingcomponents.5.2.11,57radApick-upnomina1.conica1.radius,PyramIdaIdirectionOfhavingtraverse,inc1.udedang1.em,1.05rador(60)m.Theforceofcontactonthetestsurfacesha1.1.notexceedtheappropriateva1.uegiveninTab1.e1.Tab1.e1Maximumforceon

10、sty1.usNomina1.va1.ueofsty1.ustipradiusfmMaximumstaticforceatthemean1.eve1.2075410SI)6bVa1.uesusefu1.for1.ow-hardnessmeta1.ssuchastin.5.2.2Atraverseunit,thatmovesthepick-upre1.ativetoadatumskidorrinthosecaseswheretheskidcanresu1.tindamagetothesurfaceOrintroducedistortionofthesteptobemeasured,adatums

11、urfacehavingnomina1.formoftheprofi1.e.5.2.3contro1.1.ercomponentthatsoftware,Whichamp1.ifierdisp1.ayandrecordinginstrumentinanye1.ectronicvertica1.andhorizonta1.magnification(zoom).O1.d由八WUFfiM油哪11dana1.og旭Ordi1.iR耻豌树睢Vv)overtheamp1.ifiedva1.uesofthehorizonta1.movementofthetraverseunit(1.zh).5.2.4 P

12、rofi1.erecordinginstrumentswiththefo1.1.owingproperties: traverse1.ength：1mmto100mm; rangeOfthicknessmeasurement:0,005mto250m; heightreso1.ution(dependentontherangeofmeasurement):0r0005mto1m.5.3Inductivemeasuringprobesordisp1.acementsensors5.3.1Thedesignofinductivemeasuringprobesordisp1.acementsenso

13、rsisverysimi1.artothatofthee1.ectronicsty1.usinstruments(see5.2),theprincipa1.differencebeingthatthe1.arge-radiussty1.usdoesnotp1.otthemicroprofi1.eofthesurface.5.3.2Typica1.examp1.esoperationa1.parametersandthemeasuringcharacteristicsofaninductivemeasuringOperationa1.parameters：- a1.inearityofnot1.

14、essthan0,5%;- atab1.eprovidingarecti1.inearmotiontothesurfacetobetraversed;- suitab1.eamp1.i11ers;- usingthefo1.1.owingoperationa1.parameters： radiusofsty1.us:250m; maximummagnification:50000; staticsty1.usforce:0r12N.Measurementcharacteristics: traverse1.ength:100mm; rangeofthicknessmeasurement:1mt

15、o1000m; heightreso1.ution(dependentontherangeofmeasurement)：0,02mto20m.5.4Optica1.profi1.ometersOptica1.profi1.ometersarebasedonthetechno1.ogyofoptica1.microscopes,usesimi1.arobjectivesandthutoMjbehntcRhrtbohbhttfd1.if1.on.theinterferenceorconfoca1.techniqueanddigita1.dataTypica1.examp1.esofthemeasuringcharacteristicsofoptica1.profi1.ometersareasfo1.1.ows.ForSVhItc-Hghtinterferencemicroscopes： rangeoft