常用半导体中英文对照表.docx
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1、常用半导体中英文对照表离子注入机ionimplanter1.SS理论LindhandScharffandSchiotttheory,又称林汉德-斯卡夫-斯高特理论。沟道效应channelingeffect射程分布rangedistribution深度分布depthdistribution投影射程projectedrange阻止距离stoppingdistance阻止本领stoppingpower标准阻止截面standardstoppingcrosssection退火annealing激活能activationenergy等温退火isothermalannealing激光退火laserannea
2、ling应力感生缺陷stress-induceddefect择优取向preferredorientation制版工艺mask-makingtechnology图形畸变patterndistortion初缩firstminification精缩finalminification母版mastermask铭版chromiumplate干版dryplate乳胶版emulsionplate透明版see-throughplate高分辨率版highresolutionplate,HRP超微粒干版plateforuItra-microminiaturization掩模mask掩模对准maskalignment
3、对准精度alignmentprecision光刻胶PhotOreSiSt,又称光致抗蚀剂负性光刻胶negativephotoresist正性光刻胶positivephotoresist无机光刻胶inorganicresist多层光刻胶multilevelresist电子束光刻胶electronbeamresistX射线光刻胶X-rayresist刷洗scrubbing甩胶spinning涂胶photoresistcoating光亥IJphotolithographyX射线光刻X-raylithography电子束光刻electronbeamlithography离子束光刻ionbeamlith
4、ography深紫外光刻deep-UVlithography光刻机maskaligner投影光刻机projectionmaskaligner曝光exposure接触式曝光法contactexposuremethod接近式曝光法proximityexposuremethod光学投影曝光法opticalprojectionexposuremethod电子束曝光系统electronbeamexposuresystem分步重复系统step-and-repeatsystem显影development线宽linewidth去胶strippingofphotoresist氧化去胶removingofphot
5、oresistbyoxidation等离子体去胶removingofphotoresistbyplasma刻蚀etching干法刻蚀dryetching反应离子刻蚀reactiveionetching,RIE各向同性刻蚀isotropicetching各向异性刻蚀anisotropicetching反应溅射刻蚀reactivesputteretching离子铳ionbeammilling,又称离子磨削等离子体刻蚀plasmaetching剥离技术Iift-OffteChnOIOgy,又称浮脱工艺。终点监测endpointmonitoring金属化metallization互连interconn
6、ection多层金属化multilevelmetallization电迁徙electromigration回流reflow磷硅玻璃phosphorosilicateglass硼磷硅玻璃boron-phosphorosilicateglass钝化工艺passivationtechnology多层介质钝化multilayerdielectricpassivation划片scribing电子束切片electronbeamslicingE压indentation热压焊thermocompressionbonding热超声焊thermosonicbonding冷焊coldwelding点焊spotwel
7、ding球焊ballbonding楔焊wedgebonding内弓I线焊接innerleadbonding外引线焊接OUterleadbonding梁式引线beamlead装架工艺mountingtechnology附着adhesion封装packaging金属封装metallicpackaging陶瓷封装ceramicpackaging扁平封装flatpackaging塑封plasticpackage玻璃封装glasspackaging微封装micropackaging,又称微组装。管壳package管芯die引线键合leadbonding引线框式键合Ieadframebonding带式自动
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